DocumentCode :
3518577
Title :
Carbon film formation by Nd:YAG laser ablation
Author :
Kokai, F. ; Koga, Yohei ; Niino, Hiroyuki ; Yabe, Atsushi
fYear :
1995
fDate :
10-14 July 1995
Firstpage :
147
Keywords :
Atomic beams; Atomic layer deposition; Atomic measurements; Diamond-like carbon; Kinetic energy; Laser ablation; Mass spectroscopy; Optical pulses; Pulsed laser deposition; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
Type :
conf
DOI :
10.1109/CLEOPR.1995.527055
Filename :
527055
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3518577
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