Title :
3D microstructuring of glass using electrochemical discharge machining (ECDM)
Author :
Fascio, Valia ; Wuthrich, Rolf ; Viquerat, Didier ; Langen, Hans
Author_Institution :
Dept. de Microtech., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
Abstract :
3D micropatterning is done in an electrolyte with electrodischarge assisted etching at the tool tip. Reported are the influence of the percentage of sodium ions in the sample, the applied voltage and the distance between tool and glass sample, and the induced local composition modifications. SIMS analysis has shown the diffusion and extraction of sodium ions, dissolution of SiO2$and local substitution of Na+ with H+ ions. The study of such aspects will contribute to the control of 3D microstructuring and to the local surface modification
Keywords :
electrolytic machining; etching; glass; micromachining; micromechanical devices; secondary ion mass spectroscopy; surface chemistry; surface diffusion; 3D microstructuring; H; H+ ions; Na; Na+ ions; SIMS analysis; SiO2; SiO2-; diffusion; electrochemical discharge machining; electrodischarge assisted etching; extraction; glass; local surface modification; tool tip; Cathodes; Chemical technology; Drilling; Electrodes; Etching; Glass; Hafnium; Machining; Sparks; Voltage;
Conference_Titel :
Micromechatronics and Human Science, 1999. MHS '99. Proceedings of 1999 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-5790-6
DOI :
10.1109/MHS.1999.820003
