3D microstructuring of glass using electrochemical discharge machining (ECDM)

Author

Fascio, Valia ; Wuthrich, Rolf ; Viquerat, Didier ; Langen, Hans

Author_Institution

Dept. de Microtech., Swiss Fed. Inst. of Technol., Lausanne, Switzerland

fYear

1999

fDate

1999

Firstpage

179

Lastpage

183

Abstract

3D micropatterning is done in an electrolyte with electrodischarge assisted etching at the tool tip. Reported are the influence of the percentage of sodium ions in the sample, the applied voltage and the distance between tool and glass sample, and the induced local composition modifications. SIMS analysis has shown the diffusion and extraction of sodium ions, dissolution of SiO₂^$and local substitution of Na⁺ with H⁺ ions. The study of such aspects will contribute to the control of 3D microstructuring and to the local surface modification

Keywords

electrolytic machining; etching; glass; micromachining; micromechanical devices; secondary ion mass spectroscopy; surface chemistry; surface diffusion; 3D microstructuring; H; H⁺ ions; Na; Na⁺ ions; SIMS analysis; SiO₂; SiO₂^-; diffusion; electrochemical discharge machining; electrodischarge assisted etching; extraction; glass; local surface modification; tool tip; Cathodes; Chemical technology; Drilling; Electrodes; Etching; Glass; Hafnium; Machining; Sparks; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 1999. MHS '99. Proceedings of 1999 International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-5790-6

Type

conf

DOI

10.1109/MHS.1999.820003

Filename

820003