Title :
Automation experiences on a new 1 micron production fab
Author :
Chi, Frank M T ; Cornelison, Mike ; Brain, Michael ; Schewe, Millard
Author_Institution :
Taiwan Semicond. Manuf. Co., Hsin-Chu, Taiwan
Abstract :
The authors describe an operational automation system that addresses the need for more consistent, repeatable process execution without mistakes. This system manages and controls material flow throughout the semiconductor ASIC (application-specific integrated circuit) manufacturing process. The authors describe the system implementation experience and the lessons learned. Issues of process `step/equipment validation´, work in process, storage management, material transport, and CIM (computer-integrated manufacturing) system integration are discussed. Experience in a high-volume production environment is described
Keywords :
MOS integrated circuits; VLSI; application specific integrated circuits; integrated circuit manufacture; manufacturing computer control; production control; 1 micron production fab; ASIC manufacturing process; CIM; MOS ICs; computer-integrated manufacturing; high-volume production environment; lessons learned; material transport; materials flow control; operational automation system; repeatable process execution without mistakes; storage management; system implementation experience; system integration; work in process; Automatic control; Control systems; Fabrication; Lead compounds; Manufacturing automation; Manufacturing processes; Material storage; Production facilities; Semiconductor device manufacture; Semiconductor materials;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1991. ISMSS 1991., IEEE/SEMI International
Conference_Location :
Burlingame, CA
Print_ISBN :
0-7803-0027-0
DOI :
10.1109/ISMSS.1991.146273
