Teaching CMOS integrated circuit manufacturing laboratory using a student operated factory

Author

Fuller, L.F. ; Hirschman, K.D.

Author_Institution

Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA

fYear

1997

fDate

20-23 Jul 1997

Firstpage

36

Lastpage

39

Abstract

At RIT we have been teaching integrated circuit processing laboratory courses for 15 years. In the last 5 years we have used p-well CMOS processes for the laboratory. We have developed techniques for teaching these courses that allow students to see the entire process, do all of the individual steps themselves, have working wafers to test early in the school term and obtain an introduction to manufacturing

Keywords

CMOS integrated circuits; educational courses; electronic engineering education; integrated circuit manufacture; laboratories; student experiments; CMOS integrated circuit manufacturing; IC manufacturing laboratory; IC processing laboratory courses; p-well CMOS processes; student operated factory; teaching; CMOS integrated circuits; CMOS technology; Chemical lasers; Circuit testing; Education; Educational institutions; Integrated circuit manufacture; Integrated circuit technology; Laboratories; Production facilities;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial

Conference_Location

Rochester, NY

ISSN

0749-6877

Print_ISBN

0-7803-3790-5

Type

conf

DOI

10.1109/UGIM.1997.616676

Filename

616676