DocumentCode
3520408
Title
Laser-induced forward transfer: the effect of pulse width and target-substrate distance
Author
Nakata, Y. ; Uetsuhara, H. ; Nasu, T. ; Okada, T.
Author_Institution
Dept. of Electr. & Electron. Syst. Eng., Kyushu Univ., Fukuoka, Japan
fYear
1998
fDate
3-8 May 1998
Firstpage
150
Abstract
Summary form only given. The laser-induced forward transfer (LIFT) is a promising method for micron-sized thin films deposition onto a substrate. This method has the advantages of simplicity, fast deposition rate, applicability for different materials, micron-sized patterned deposition, and so on. In this study, in order to investigate the effect of laser pulse width on the deposition characteristics of LIFT, deposition of micronsized gold thin films was carried out with different pulse widths from 140 fs to 60 /spl mu/s. The morphologies of the ablated area on the target and the deposited film were examined by scanning electron microscope (SEM) for different pulse durations of ablation lasers and target substrate distances.
Keywords
gold; metallic thin films; optical films; pulsed laser deposition; scanning electron microscopy; 140 fs to 60 mus; Au; SEM; ablated area; ablation lasers; deposited film; deposition characteristics; fast deposition rate; laser pulse width; laser-induced forward transfer; micron-sized patterned deposition; micron-sized thin films deposition; micronsized gold thin films; pulse durations; pulse width; pulse widths; scanning electron microscope; substrate; target substrate distances; target-substrate distance; Gold; Laser ablation; Morphology; Optical materials; Optical pulses; Pulsed laser deposition; Scanning electron microscopy; Space vector pulse width modulation; Sputtering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
1-55752-339-0
Type
conf
DOI
10.1109/CLEO.1998.675982
Filename
675982
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