DocumentCode :
3520408
Title :
Laser-induced forward transfer: the effect of pulse width and target-substrate distance
Author :
Nakata, Y. ; Uetsuhara, H. ; Nasu, T. ; Okada, T.
Author_Institution :
Dept. of Electr. & Electron. Syst. Eng., Kyushu Univ., Fukuoka, Japan
fYear :
1998
fDate :
3-8 May 1998
Firstpage :
150
Abstract :
Summary form only given. The laser-induced forward transfer (LIFT) is a promising method for micron-sized thin films deposition onto a substrate. This method has the advantages of simplicity, fast deposition rate, applicability for different materials, micron-sized patterned deposition, and so on. In this study, in order to investigate the effect of laser pulse width on the deposition characteristics of LIFT, deposition of micronsized gold thin films was carried out with different pulse widths from 140 fs to 60 /spl mu/s. The morphologies of the ablated area on the target and the deposited film were examined by scanning electron microscope (SEM) for different pulse durations of ablation lasers and target substrate distances.
Keywords :
gold; metallic thin films; optical films; pulsed laser deposition; scanning electron microscopy; 140 fs to 60 mus; Au; SEM; ablated area; ablation lasers; deposited film; deposition characteristics; fast deposition rate; laser pulse width; laser-induced forward transfer; micron-sized patterned deposition; micron-sized thin films deposition; micronsized gold thin films; pulse durations; pulse width; pulse widths; scanning electron microscope; substrate; target substrate distances; target-substrate distance; Gold; Laser ablation; Morphology; Optical materials; Optical pulses; Pulsed laser deposition; Scanning electron microscopy; Space vector pulse width modulation; Sputtering; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
1-55752-339-0
Type :
conf
DOI :
10.1109/CLEO.1998.675982
Filename :
675982
Link To Document :
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