DocumentCode
3520413
Title
Equipment maintenance, operating costs and safety for Rochester Institute of Technology´s Integrated Circuit Laboratory
Author
Fuller, Lynn ; Blondell, Scott ; Yackoff, Dave ; Reynolds, Clay
Author_Institution
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
fYear
1997
fDate
20-23 Jul 1997
Firstpage
49
Lastpage
52
Abstract
Having a cleanroom for microelectronics activities at a university is one thing. Keeping it stocked with supplies, the facility operating properly, and the equipment running is another thing. This paper describes the systems that have been established for the operation of the microelectronics facility at Rochester Institute of Technology
Keywords
clean rooms; economics; electronic engineering education; integrated circuit manufacture; maintenance engineering; safety; IC laboratory; Rochester Institute of Technology; cleanroom; equipment maintenance; microelectronics activities; operating costs; safety; supplies; Chemical lasers; Costs; Electron beams; Integrated circuit technology; Laboratories; Lithography; Microelectronics; Safety devices; Sputter etching; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial
Conference_Location
Rochester, NY
ISSN
0749-6877
Print_ISBN
0-7803-3790-5
Type
conf
DOI
10.1109/UGIM.1997.616680
Filename
616680
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