Title :
Transient photocurrents in tantalum pentoxide films
Author_Institution :
Dept. of Electron. Eng., Shinshu Univ., Nagano, Japan
Abstract :
The mechanism of conduction between a Ta2O5 film and a metal electrode was studied by means of photocurrent measurements. The nature of the metal/Ta2O5 interface is shown as well as the energy diagram deduced from the results. Transient current decaying with time has been observed in the Al/Ta2O5 interface and explained in terms of the space charge effect due to the blocking barrier of Al2O3 formed at the interface
Keywords :
electronic conduction in insulating thin films; metal-insulator boundaries; photoconductivity; space charge; tantalum compounds; Al-Al2O3-Ta2O5; Al-Ta2O5 interface; blocking barrier; energy diagram; mechanism of conduction; space charge effect; transient photocurrents; Dielectric thin films; Dielectrics and electrical insulation; Electrodes; Electronics industry; Etching; Optical surface waves; Photoconductivity; Photonic band gap; Temperature dependence; Wavelength measurement;
Conference_Titel :
Conduction and Breakdown in Solid Dielectrics, 1989., Proceedings of the 3rd International Conference on
Conference_Location :
Trondheim
DOI :
10.1109/ICSD.1989.69179
