Title :
Dynamic analysis of structure of a piezoelectric MEMS micro-mirror actuator: Effects of chip anisotropy and residual stress
Author :
Matin, A. ; Akai, D. ; Ozaki, K. ; Kawazu, N. ; Hanebuchi, M. ; Sawada, K. ; Ishida, M.
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Toyohashi, Japan
Abstract :
This paper presents the dynamic behavior of a piezoelectric MEMS actuator using finite element simulations taking anisotropic properties of silicon chip and technologically induced stress into account. Silicon anisotropy has shown to shift eigenfrequencies particularly in higher eigenmodes compared to that of isotropic case. Technologically induced stress has resulted in substantial influence on both eigenfrequencies and eigenmodes. Eigenmodes were found to be significantly changed and shifted with such a stress state. Dynamic harmonic analysis exhibited a significant maximum vertical deflection of ~28 ¿m attainable with the actuator when excited at a resonant frequency of 112,600 Hz under 2D scanning mode.
Keywords :
eigenvalues and eigenfunctions; finite element analysis; internal stresses; magnetic anisotropy; microactuators; micromirrors; piezoelectric actuators; silicon; anisotropic property; chip anisotropy; dynamic behavior; dynamic harmonic analysis; eigenfrequency; eigenmode; finite element simulation; piezoelectric MEMS micromirror actuator; residual stress; silicon chip; stress state; Anisotropic magnetoresistance; Capacitive sensors; Conducting materials; Dielectric materials; Dielectric thin films; Electrodes; Ferroelectric materials; Micromechanical devices; Piezoelectric actuators; Residual stresses;
Conference_Titel :
Electronics Packaging Technology Conference, 2009. EPTC '09. 11th
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-5099-2
Electronic_ISBN :
978-1-4244-5100-5
DOI :
10.1109/EPTC.2009.5416510
