Title :
A multi-project MEMS lecture and laboratory course
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
Abstract :
This paper will describe a senior/graduate level, elective, lecture and laboratory course Microelectromechanical Systems (MEMs). The course was designed for students in RIT´s microelectronic engineering program. Therefore, the students had a basic understanding of most processing technologies. The lecture focused on physical fundamentals of mechanical structures and MEMs specific process technology. The laboratory part of the program included device design, process design, maskmaking, processing and testing of a multi-project chip
Keywords :
educational courses; electronic engineering education; micromechanical devices; MEMS; laboratory course; lecture course; microelectronic engineering; multi-project chip; Chemical lasers; Doping; Laboratories; Lithography; Micromechanical devices; Plasma applications; Plasma temperature; Resists; Silicon; Wet etching;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial
Conference_Location :
Rochester, NY
Print_ISBN :
0-7803-3790-5
DOI :
10.1109/UGIM.1997.616709
