Title :
Fabrication and hydrogen sensing properties of Titania nanotubes
Author :
Bai, Shuo ; Ding, Dongyan ; Ning, Congqin ; Qin, Rui ; Li, Yan ; Chang, Chengkang ; Li, Ming ; Mao, Dali
Author_Institution :
Lab. of Microelectron. Mater. & Technol., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
TiO2 nanotubes have wide applications in gas sensing applications such as oxygen sensors and hydrogen sensors. In this work, crystallized TiO2 nanotubes self-assembled on Ti substrate were fabricated through anodization and heat-treatment. The anodization parameters for fabricating optimized nanostructures were investigated and hydrogen sensing properties of the nanotubes were tested. It was found that the anodization temperature and voltage had a great impact on the formation of uniform nanotubes or nanostructures. And the nanotubes assembled on Cu-coated PCB demonstrated a good hydrogen sensing properties at room temperature.
Keywords :
anodisation; copper; gas sensors; heat treatment; hydrogen; nanofabrication; nanosensors; nanotube devices; self-assembly; titanium compounds; H2; TiO2; anodization parameters; copper-coated PCB; gas sensing application; heat treatment; hydrogen sensing properties; nanostructure fabrication; nanostructure formation; nanotube self-assembly; temperature 293 K to 298 K; titania nanotube fabrication; uniform nanotube formation; Crystallization; Fabrication; Gas detectors; Hydrogen; Nanostructures; Nanotubes; Self-assembly; Temperature sensors; Testing; Voltage;
Conference_Titel :
Electronic Packaging Technology & High Density Packaging, 2009. ICEPT-HDP '09. International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-4658-2
Electronic_ISBN :
978-1-4244-4659-9
DOI :
10.1109/ICEPT.2009.5270693
