Title :
Fabrication of free-space integrated optical disk pickup heads by surface- micromachining technology
Author :
Lin, Lih Y. ; Lee, S.S. ; Wu, Ming C.
Keywords :
High speed optical techniques; Integrated optics; Lenses; Micromachining; Microoptics; Optical device fabrication; Optical diffraction; Optical reflection; Optical sensors; Writing;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.527070