• DocumentCode
    3522633
  • Title

    Blue cathodoluminescence from tantalum zinc oxide

  • Author

    Langley, Robert J. ; Puchades, Ivan ; Kurinec, Santosh K. ; Potter, Michael D.

  • Author_Institution
    Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
  • fYear
    1997
  • fDate
    20-23 Jul 1997
  • Firstpage
    161
  • Lastpage
    164
  • Abstract
    We have observed cathodoluminescence (CL) at low voltages (<50 V) with a peak at ~410 nm from tantalum zinc oxide, Ta2Zn3O8, (TZO). The thin films were prepared by reacting Ta with ZnO on silicon and silicon dioxide substrates at elevated temperatures (1200°C) using rapid thermal annealing. Subsequently, the bulk phase was synthesized from the powder raw materials, ZnO and Ta2O5 using ceramic techniques. The resulting material shows similar CL characteristics. No charging was observed during the CL measurements, indicating a conducting nature of the material. It is observed that TZO exhibits better blue both in thin film and bulk form, as compared to conventional ZnS:Ag, a blue CRT phosphor and zinc gallate, another low voltage blue phosphor
  • Keywords
    cathodoluminescence; phosphors; rapid thermal annealing; tantalum compounds; thin films; zinc; 1200 C; 410 nm; 50 V; RTA; Ta; Ta2O5; Ta2Zn3O8; ZnO; blue cathodoluminescence; bulk phase; ceramic techniques; low voltage blue phosphor; powder raw materials; rapid thermal annealing; thin films; Conducting materials; Low voltage; Phosphors; Powders; Rapid thermal annealing; Semiconductor thin films; Silicon compounds; Substrates; Temperature; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial
  • Conference_Location
    Rochester, NY
  • ISSN
    0749-6877
  • Print_ISBN
    0-7803-3790-5
  • Type

    conf

  • DOI
    10.1109/UGIM.1997.616716
  • Filename
    616716