Title :
Blue cathodoluminescence from tantalum zinc oxide
Author :
Langley, Robert J. ; Puchades, Ivan ; Kurinec, Santosh K. ; Potter, Michael D.
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
Abstract :
We have observed cathodoluminescence (CL) at low voltages (<50 V) with a peak at ~410 nm from tantalum zinc oxide, Ta2Zn3O8, (TZO). The thin films were prepared by reacting Ta with ZnO on silicon and silicon dioxide substrates at elevated temperatures (1200°C) using rapid thermal annealing. Subsequently, the bulk phase was synthesized from the powder raw materials, ZnO and Ta2O5 using ceramic techniques. The resulting material shows similar CL characteristics. No charging was observed during the CL measurements, indicating a conducting nature of the material. It is observed that TZO exhibits better blue both in thin film and bulk form, as compared to conventional ZnS:Ag, a blue CRT phosphor and zinc gallate, another low voltage blue phosphor
Keywords :
cathodoluminescence; phosphors; rapid thermal annealing; tantalum compounds; thin films; zinc; 1200 C; 410 nm; 50 V; RTA; Ta; Ta2O5; Ta2Zn3O8; ZnO; blue cathodoluminescence; bulk phase; ceramic techniques; low voltage blue phosphor; powder raw materials; rapid thermal annealing; thin films; Conducting materials; Low voltage; Phosphors; Powders; Rapid thermal annealing; Semiconductor thin films; Silicon compounds; Substrates; Temperature; Zinc oxide;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial
Conference_Location :
Rochester, NY
Print_ISBN :
0-7803-3790-5
DOI :
10.1109/UGIM.1997.616716