DocumentCode
3523032
Title
Zinc diffusion process for GaAs0.6P0.4 red light emitting diode fabrication in an undergraduate laboratory
Author
Lawrence, David J. ; Heineman, Dawn L.
Author_Institution
Integrated Sci. & Technol. Program, James Madison Univ., Harrisonburg, VA, USA
fYear
1997
fDate
20-23 Jul 1997
Firstpage
169
Lastpage
172
Abstract
The formation of p+-n junctions by zinc diffusion into n-type GaAs0.6P0.4 wafers is described. Processes developed in this work allow experience with chemical vapor deposition and the fabrication of red LEDs in an undergraduate laboratory with minimal student exposure to hazardous chemicals. Electrical and optical characteristics of the resulting LEDs are presented
Keywords
III-V semiconductors; chemical vapour deposition; diffusion; electronic engineering education; gallium arsenide; gallium compounds; light emitting diodes; p-n junctions; semiconductor doping; student experiments; zinc; CVD; GaAs0.6P0.4 red LED; GaAs0.6P0.4:Zn; LED fabrication; Zn diffusion process; Zn diffusion source films; ZnO; ZnO deposition; chemical vapor deposition; electrical characteristics; n-type GaAsP wafers; optical characteristics; p+-n junction formation; red light emitting diode; undergraduate laboratory; Chemical vapor deposition; Furnaces; Gallium arsenide; Heat treatment; Laboratories; Light emitting diodes; Optical device fabrication; Silicon compounds; Surface treatment; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial
Conference_Location
Rochester, NY
ISSN
0749-6877
Print_ISBN
0-7803-3790-5
Type
conf
DOI
10.1109/UGIM.1997.616718
Filename
616718
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