DocumentCode :
3523978
Title :
High-average-power, high-repetition-rate, injection-seeded 213 nm generation for optical microlithography
Author :
Kubota, Sho ; Masuda, Hiroji ; Kikuchi, Hiroaki ; Oka, Mitsuru ; Alexander, James
Author_Institution :
Kubota Opto-Electronics Laboratory, Research Center, Sony Corporation
Volume :
11
fYear :
1997
fDate :
18-23 May 1997
Firstpage :
511
Lastpage :
512
Keywords :
Bandwidth; Frequency conversion; Laser beams; Laser excitation; Nonlinear optics; Optical harmonic generation; Optical pulse generation; Optical pumping; Pulse modulation; Pump lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
Type :
conf
DOI :
10.1109/CLEO.1997.603520
Filename :
603520
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3523978
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