Title :
The optimizationg of low-loss SAW filter with high rectangle factor
Author :
Shi, Xiang-long ; Chen, Xiao-yang ; Bao, Ke-xiang ; Zhou, Pei-gen
Author_Institution :
Beijing Changfeng SAW Co., Beijing, China
Abstract :
High rectangle factor has been one of the most impressive characters of SAW filter, especially low-loss SAW filters used in recent years. Many experts dedicated to this kind of research and obtained some excellent results, many improvements were promoted as well. This paper starts form frequency dependent COM parameters extraction method, discussing the pitch-modulated IDTs and reflectors structure and in between shorted-grating structure, high rectangle factor, low-loss DMS can be easily designed by using COM model and global optimization algorithm. Some optimized results have been given in this paper; High precision Stepper and lift-off technology be used in order to realize these filters, the results are in accordance with theory simulation well, the most important is the yield of product has been greatly improved.
Keywords :
computer output to microfilm; interdigital transducers; optimisation; surface acoustic wave filters; frequency dependent COM parameters extraction method; global optimization algorithm; high precision stepper technology; high rectangle factor; lift-off technology; low-loss DMS; low-loss SAW filter; pitch-modulated IDT; reflector structure; shorted-grating structure; Acoustic waves; Bandwidth; Filtering theory; Frequency dependence; Optimization; Resonator filters; SAW filters; COM; DMS; rectangle factor;
Conference_Titel :
Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2011 Symposium on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4673-1075-8
DOI :
10.1109/SPAWDA.2011.6167237