Title :
Analysis of the vibration of Film Bulk Acoustic wave Resonators based on Mindlin plate theory
Author :
Huang, Dejin ; Wang, Ji
Author_Institution :
Sch. of Mech. Eng. & Mech., Ningbo Univ., Ningbo, China
Abstract :
Analytical solutions for vibration of Film Bulk Acoustic wave Resonators (FBAR) are obtained based on Mindlin plate theory. The electrodes are considered as layers of plates with their own stiffness and mass properties. The differential equations of motion are derived including the thickness-shear and flexural mode. First order approximation is applied to study the vibration of FBAR. The dispersion relation of the vibration and the frequency spectrum are obtained. Numerical results show that the shift of dispersion relation between with and without electrodes consideration.
Keywords :
approximation theory; bulk acoustic wave devices; differential equations; surface acoustic wave resonators; vibrations; Mindlin plate theory; differential equations; dispersion relation; electrodes consideration; film bulk acoustic wave resonators; first order approximation; flexural mode; frequency spectrum; mass properties; thickness-shear; vibration analysis; Acoustic waves; Dispersion; Electrodes; Equations; Film bulk acoustic resonators; Mathematical model; Vibrations; Analytical solution; Mindlin plate theory; Paper Layered structures;
Conference_Titel :
Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2011 Symposium on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4673-1075-8
DOI :
10.1109/SPAWDA.2011.6167256
