Analysis of the vibration of Film Bulk Acoustic wave Resonators based on Mindlin plate theory

Author

Huang, Dejin ; Wang, Ji

Author_Institution

Sch. of Mech. Eng. & Mech., Ningbo Univ., Ningbo, China

fYear

2011

fDate

9-11 Dec. 2011

Firstpage

328

Lastpage

331

Abstract

Analytical solutions for vibration of Film Bulk Acoustic wave Resonators (FBAR) are obtained based on Mindlin plate theory. The electrodes are considered as layers of plates with their own stiffness and mass properties. The differential equations of motion are derived including the thickness-shear and flexural mode. First order approximation is applied to study the vibration of FBAR. The dispersion relation of the vibration and the frequency spectrum are obtained. Numerical results show that the shift of dispersion relation between with and without electrodes consideration.

Keywords

approximation theory; bulk acoustic wave devices; differential equations; surface acoustic wave resonators; vibrations; Mindlin plate theory; differential equations; dispersion relation; electrodes consideration; film bulk acoustic wave resonators; first order approximation; flexural mode; frequency spectrum; mass properties; thickness-shear; vibration analysis; Acoustic waves; Dispersion; Electrodes; Equations; Film bulk acoustic resonators; Mathematical model; Vibrations; Analytical solution; Mindlin plate theory; Paper Layered structures;

fLanguage

English

Publisher

ieee

Conference_Titel

Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2011 Symposium on

Conference_Location

Shenzhen

Print_ISBN

978-1-4673-1075-8

Type

conf

DOI

10.1109/SPAWDA.2011.6167256

Filename

6167256