Title :
Fast and simple via opening technology in teflon and polyimide by combining laser irradiation and ul
Keywords :
Chemical lasers; Chemical technology; Cleaning; Drilling; Laser ablation; Laser stability; Optical materials; Optical pulses; Polyimides; Pulsed laser deposition;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.527116