DocumentCode :
3525024
Title :
Development of mask-pattern proiection optical system for excimer laser ablation
Author :
Minagawa, Tomonori ; Izumo, M. ; Matsushita, Yuki ; Sugitatsu, A. ; Zumoto, N. ; Yagi, Yasushi
fYear :
1995
fDate :
10-14 July 1995
Firstpage :
188
Keywords :
Distributed Bragg reflectors; Laser ablation; Laser mode locking; Lenses; Optical distortion; Optical imaging; Optical materials; Optical modulation; Optical variables control; Reflectivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
Type :
conf
DOI :
10.1109/CLEOPR.1995.527120
Filename :
527120
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3525024
بازگشت