Title :
Polyimide optical waveguides fabricated by direct electron beam writing
Author :
Sakata, T. ; Maruno, T. ; Ishii, T. ; Maruo, Y.Y. ; Sasaki, S. ; Tamamura, T.
Keywords :
Electron beams; Electron optics; Optical films; Optical losses; Optical polymers; Optical refraction; Optical variables control; Optical waveguides; Polyimides; Writing;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.527134