Title :
Thermal field processes in liquid metal ion sources
Author_Institution :
Inst. for Anal. Instrum., Russian Acad. of Sci., St. Petersburg, Russia
Abstract :
The emission of excited neutrals and positive ions from the liquid metal surface in electric fields depends on thermal field processes. Such processes include interaction between the liquid metal surface and electron flux of high power density exceeding a threshold value P*, evaporation of neutrals activated by metal electron subsystem excitation, and lastly, field ionization of evaporating neutrals. All these processes are interrelated and cyclic in nature.
Keywords :
electric fields; excited states; field ionisation; liquid metal ion sources; positive ions; electric fields; electron flux interaction; excited neutral emission; field ionization; liquid metal ion sources; liquid metal surface; liquid metal surface interaction; metal electron subsystem excitation; neutral evaporation; positive ion emission; thermal field processes; Atomic layer deposition; Current density; Electron emission; Ion emission; Ion sources; Ionization; Iron; Surface treatment; Temperature; Thermal conductivity;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location :
Shizuoka
Print_ISBN :
978-1-4244-3587-6
Electronic_ISBN :
978-1-4244-3588-3
DOI :
10.1109/IVNC.2009.5271565
