Title :
Nano-diamond ridge structure emission arrays capped on micro-patterned silicon pillars
Author :
Ghosh, N. ; Kang, W.P. ; Raina, S. ; Davidson, J.L.
Author_Institution :
Dept. of Electr. Eng., Vanderbilt Univ., Nashville, TN, USA
Abstract :
CVD nano-diamond structures are interesting electron emitters because of their superior electronic properties and tolerance to operate at much higher temperatures and harsh environments. Other advantages of nano-diamond as emitters include chemical and electrical stability, high breakdown voltage, low turn-on electric field and excellent thermal conductivity. In this paper, the authors report the fabrication and observation of electron field emission from an array nano-diamond ridge structure capped on micropatterned silicon pillars.
Keywords :
cathodes; diamond; electron field emission; nanostructured materials; nanotechnology; plasma CVD coatings; silicon; Si; electron emitter; micropatterned silicon pillars; nanodiamond ridge structure emission array; plasma enhanced chemical vapor deposition; Aluminum; Chemical vapor deposition; Electron emission; Fabrication; Nanostructures; Plasma temperature; Silicon; Testing; Thermal conductivity; Wet etching;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location :
Shizuoka
Print_ISBN :
978-1-4244-3587-6
Electronic_ISBN :
978-1-4244-3588-3
DOI :
10.1109/IVNC.2009.5271594