In-situ TEM observation and electrical measurement of gold nanocontact during tensile test using MEMS opposing tips

Gold nanocontact was formed between gold opposing tips in the ultra high vacuum transmission electron microscope (TEM). Quantum changes in conductance were observed at room temperature during the thinning process of the nanocontact. In the nanotechnology research, it is essential to study the relationship between the shape and the characteristic at a nano scale. The characteristics of nano structures can be easily affected by the atomic sized shape change because even such minute shape changes are not negligible as compared to nano structures. In order to investigate the effect, one of the promising approaches is the real time observation of nano scopic change in a nano structure, while its characteristics are measured. However, it is extraordinary difficult to observe nano scaled structural change in real time. We have developed MEMS (microelectromechanical systems)-in-TEM system to tackle this difficult issue. As for the nano scaled structural change, MEMS technology can provide tips as sharp as tens of nanometers; by pushing them together a nano contact is formed. MEMS actuators that are very stable and precise are able to pull and deform the contact very slowly. In addition, TEM is a powerful tool for a real time observation at a nano scale. Therefore, we introduced MEMS opposing tips into TEM in order to visualize the structural deformation at a contact point between tips.