Title :
Design and fabrication of 1-by-4 MMI power splitter for optical communication
Author :
Huilian, Ma ; Jianyi, Yang ; Qiang, Zhou ; Minghua, Wang
Author_Institution :
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
Abstract :
An optical power splitter to allow for fiber connections, which is based on an MMI coupler, in GaAs/GaAlAs has been designed and fabricated. The epitaxial materials are grown by MBE. The wet chemical etching process is applied to fabricate the ribs in this device. The measuring results are presented.
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; integrated optics; optical beam splitters; optical communication equipment; optical design techniques; optical fabrication; optical fibre couplers; 1-by-4 MMI power splitter; GaAs-GaAlAs; GaAs/GaAlAs; MBE; MMI coupler; design; epitaxial materials; fabrication; fiber connections; optical communication; optical power splitter; ribs; wet chemical etching process; Chemical processes; Gallium arsenide; Molecular beam epitaxial growth; Optical coupling; Optical design; Optical device fabrication; Optical fiber couplers; Optical fiber devices; Optical materials; Wet etching;
Conference_Titel :
Communications, 1999. APCC/OECC '99. Fifth Asia-Pacific Conference on ... and Fourth Optoelectronics and Communications Conference
Conference_Location :
Beijing, China
Print_ISBN :
7-5635-0402-8
DOI :
10.1109/APCC.1999.820609
