DocumentCode :
3526678
Title :
Growth rate effects in soft CoFe films
Author :
Vopsaroiu, M. ; Georgieva, M. ; Grundy, P.J. ; Thwaites, M.J. ; Grady, K.O.
Author_Institution :
Dept. of Phys., York Univ., UK
fYear :
2005
fDate :
4-8 April 2005
Firstpage :
45
Lastpage :
46
Abstract :
In this paper we demonstrate the preparation of CoFe thin films with control of Hc and Ms over a broad range of values. A change in Hc of a factor 10 and a change in Ms by a factor of 2.5 have been achieved by using a special plasma sputtering design called HiTUS (high target utilization sputtering). The change in both Hc and Ms has been achieved by tuning the growth rate. We observed a close relationship between sputtering rate and the final grain size structure of the films. It appears that a low sputtering rate promotes the formation of grains as small as 7 nm, while a fast sputtering rate results in films with mean grain size of 26 nm. This change in the grain size has been observed by a consistent TEM and grain size analysis. However, the saturation magnetization of the two samples is also modified by a factor similar to that in the mean grain size. This suggested that an increase in the saturation magnetization can be achieved by increasing the packing density of samples having small grains. By changing the packing fraction and grain size, the structural, magnetic and electric properties of the films can be substantially altered depending upon the specific application.
Keywords :
cobalt alloys; coercive force; ferromagnetic materials; grain size; iron alloys; magnetic thin films; metallic thin films; soft magnetic materials; sputter deposition; transmission electron microscopy; 26 nm; CoFe; TEM; final grain size structure; grain size analysis; high target utilization sputtering; packing density; packing fraction; saturation magnetization; soft CoFe thin films; sputtered films; sputtering rate; Coercive force; Grain size; Magnetic films; Magnetic heads; Magnetic hysteresis; Physics; Plasma density; Plasma devices; Saturation magnetization; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
Type :
conf
DOI :
10.1109/INTMAG.2005.1463451
Filename :
1463451
Link To Document :
بازگشت