Title :
14×14 beams in a scanning electron microscope
Author :
Mohammadi-Gheidari, Ali ; Kruit, Pieter
Author_Institution :
Delft Univ. of Technol., Delft, Netherlands
Abstract :
In this paper, the multi-beam source (MBS) unite is analyzed and the experimental results are presented. The basic concept in the MBS is that the broad beam of a high brightness Schottky source is split up into multiple sub-beams by an aperture array (AA). The AA is a silicon wafer with 100 holes and together with two macro electrodes acts as an aperture lens array (ALA) to focus each beam individually on to the blanker array (BA).
Keywords :
lenses; scanning electron microscopes; aperture array; aperture lens array; blanker array; high brightness Schottky source; multibeam source; scanning electron microscope; silicon wafer; Apertures; Electron beams; Inspection; Lenses; Lithography; Materials science and technology; Particle beams; Scanning electron microscopy; Spatial resolution; Throughput;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location :
Shizuoka
Print_ISBN :
978-1-4244-3587-6
Electronic_ISBN :
978-1-4244-3588-3
DOI :
10.1109/IVNC.2009.5271608
