• DocumentCode
    3526767
  • Title

    14×14 beams in a scanning electron microscope

  • Author

    Mohammadi-Gheidari, Ali ; Kruit, Pieter

  • Author_Institution
    Delft Univ. of Technol., Delft, Netherlands
  • fYear
    2009
  • fDate
    20-24 July 2009
  • Firstpage
    183
  • Lastpage
    184
  • Abstract
    In this paper, the multi-beam source (MBS) unite is analyzed and the experimental results are presented. The basic concept in the MBS is that the broad beam of a high brightness Schottky source is split up into multiple sub-beams by an aperture array (AA). The AA is a silicon wafer with 100 holes and together with two macro electrodes acts as an aperture lens array (ALA) to focus each beam individually on to the blanker array (BA).
  • Keywords
    lenses; scanning electron microscopes; aperture array; aperture lens array; blanker array; high brightness Schottky source; multibeam source; scanning electron microscope; silicon wafer; Apertures; Electron beams; Inspection; Lenses; Lithography; Materials science and technology; Particle beams; Scanning electron microscopy; Spatial resolution; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
  • Conference_Location
    Shizuoka
  • Print_ISBN
    978-1-4244-3587-6
  • Electronic_ISBN
    978-1-4244-3588-3
  • Type

    conf

  • DOI
    10.1109/IVNC.2009.5271608
  • Filename
    5271608
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3526767