DocumentCode
3527269
Title
Uniform and stable emission characteristics for amorphous carbon coated transfer mold nickel field emitter arrays in hash environment
Author
Moon, Jonghyun ; Nakamoto, Masayuki ; Shiratori, Koji
Author_Institution
Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
fYear
2009
fDate
20-24 July 2009
Firstpage
41
Lastpage
42
Abstract
Uniform and stable Transfer Mold FEAs have been developed by coating amorphous carbon (a-C) films with high hardness and chemical inertness on Transfer Mold FEAs to realize uniform and stable field emission characteristics in hash environment such as strong plasma atmosphere in satellite orbits on the earth, field emission display manufacturing process, and so on (Nakamoto et al., 1993). Though turn-on fields of Ni-FEAs were increased 100% after O2 radical treatment, those of a-C coated on Ni-FEAs were increased less than 10%. The damage by 02 radical treatment was improved more than 90 % because of coating a-C as a protective layer on Ni-FEA.
Keywords
coatings; field emission; field emitter arrays; films; nickel; transfer moulding; Ni; amorphous carbon coated transfer mold nickel; amorphous carbon films; chemical inertness; field emission characteristics; field emitter arrays; stable emission characteristics; stable transfer mold FEA; uniform emission characteristics; uniform transfer mold FEA; Amorphous materials; Carbon dioxide; Chemical processes; Coatings; Field emitter arrays; Nickel; Plasma chemistry; Plasma displays; Plasma materials processing; Plasma properties;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location
Shizuoka
Print_ISBN
978-1-4244-3587-6
Electronic_ISBN
978-1-4244-3588-3
Type
conf
DOI
10.1109/IVNC.2009.5271635
Filename
5271635
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