• DocumentCode
    3527269
  • Title

    Uniform and stable emission characteristics for amorphous carbon coated transfer mold nickel field emitter arrays in hash environment

  • Author

    Moon, Jonghyun ; Nakamoto, Masayuki ; Shiratori, Koji

  • Author_Institution
    Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
  • fYear
    2009
  • fDate
    20-24 July 2009
  • Firstpage
    41
  • Lastpage
    42
  • Abstract
    Uniform and stable Transfer Mold FEAs have been developed by coating amorphous carbon (a-C) films with high hardness and chemical inertness on Transfer Mold FEAs to realize uniform and stable field emission characteristics in hash environment such as strong plasma atmosphere in satellite orbits on the earth, field emission display manufacturing process, and so on (Nakamoto et al., 1993). Though turn-on fields of Ni-FEAs were increased 100% after O2 radical treatment, those of a-C coated on Ni-FEAs were increased less than 10%. The damage by 02 radical treatment was improved more than 90 % because of coating a-C as a protective layer on Ni-FEA.
  • Keywords
    coatings; field emission; field emitter arrays; films; nickel; transfer moulding; Ni; amorphous carbon coated transfer mold nickel; amorphous carbon films; chemical inertness; field emission characteristics; field emitter arrays; stable emission characteristics; stable transfer mold FEA; uniform emission characteristics; uniform transfer mold FEA; Amorphous materials; Carbon dioxide; Chemical processes; Coatings; Field emitter arrays; Nickel; Plasma chemistry; Plasma displays; Plasma materials processing; Plasma properties;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
  • Conference_Location
    Shizuoka
  • Print_ISBN
    978-1-4244-3587-6
  • Electronic_ISBN
    978-1-4244-3588-3
  • Type

    conf

  • DOI
    10.1109/IVNC.2009.5271635
  • Filename
    5271635