DocumentCode :
3527389
Title :
Direct growth method of carbon nanotubes onto a tungsten tip for field emitter fabrication
Author :
Sato, Hideki ; Ikesugi, Koichi ; Kanayama, Hisanori ; Kajiwara, Kazuo ; Hata, Kochi
Author_Institution :
Grad. Sch. of Eng., Mie Univ., Tsu, Japan
fYear :
2009
fDate :
20-24 July 2009
Firstpage :
253
Lastpage :
254
Abstract :
The author developed a method to grow CNTs selectively onto an apex of W-tip using "selective etching" method. Here the author reports that this method is also valid to control the number of CNTs at the W-tip.
Keywords :
carbon nanotubes; etching; field emission; semiconductor growth; W-tip; carbon nanotubes; direct growth method; field emitter fabrication; selective etching; tungsten tip; Carbon nanotubes; Chemical vapor deposition; Electrokinetics; Etching; Fabrication; Inductors; Iron; Nonhomogeneous media; Scanning electron microscopy; Tungsten;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location :
Shizuoka
Print_ISBN :
978-1-4244-3587-6
Electronic_ISBN :
978-1-4244-3588-3
Type :
conf
DOI :
10.1109/IVNC.2009.5271643
Filename :
5271643
Link To Document :
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