• DocumentCode
    3527699
  • Title

    Study of the synthesis of WO3 nano-structured arrays by tungsten hot filament chemical vapor deposition method and their field emission properties

  • Author

    Lu, Di ; Liang, Bo ; Ogino, Akihisa ; Nagatsu, Masaaki

  • Author_Institution
    Grad. Sch. of Sci. & Technol., Shizuoka Univ., Hamamatsu, Japan
  • fYear
    2009
  • fDate
    20-24 July 2009
  • Firstpage
    237
  • Lastpage
    238
  • Abstract
    Here in this work, the hot filament chemical vapor deposition method is adopted, with an extra heating stage is employed as well, to control the substrate temperature precisely. Since this method, different kinds of WO3 nano-structure arrays were prepared, and their FE properties were studied.
  • Keywords
    chemical vapour deposition; field emission; nanostructured materials; substrates; tungsten compounds; WO3; chemical vapor deposition; extra heating stage; field emission properties; nanostructured arrays; substrate temperature; tungsten hot filament; Argon; Chemical technology; Chemical vapor deposition; Heating; Iron; Materials science and technology; Semiconductor materials; Substrates; Temperature control; Tungsten;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
  • Conference_Location
    Shizuoka
  • Print_ISBN
    978-1-4244-3587-6
  • Electronic_ISBN
    978-1-4244-3588-3
  • Type

    conf

  • DOI
    10.1109/IVNC.2009.5271659
  • Filename
    5271659
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3527699