DocumentCode :
3527699
Title :
Study of the synthesis of WO3 nano-structured arrays by tungsten hot filament chemical vapor deposition method and their field emission properties
Author :
Lu, Di ; Liang, Bo ; Ogino, Akihisa ; Nagatsu, Masaaki
Author_Institution :
Grad. Sch. of Sci. & Technol., Shizuoka Univ., Hamamatsu, Japan
fYear :
2009
fDate :
20-24 July 2009
Firstpage :
237
Lastpage :
238
Abstract :
Here in this work, the hot filament chemical vapor deposition method is adopted, with an extra heating stage is employed as well, to control the substrate temperature precisely. Since this method, different kinds of WO3 nano-structure arrays were prepared, and their FE properties were studied.
Keywords :
chemical vapour deposition; field emission; nanostructured materials; substrates; tungsten compounds; WO3; chemical vapor deposition; extra heating stage; field emission properties; nanostructured arrays; substrate temperature; tungsten hot filament; Argon; Chemical technology; Chemical vapor deposition; Heating; Iron; Materials science and technology; Semiconductor materials; Substrates; Temperature control; Tungsten;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location :
Shizuoka
Print_ISBN :
978-1-4244-3587-6
Electronic_ISBN :
978-1-4244-3588-3
Type :
conf
DOI :
10.1109/IVNC.2009.5271659
Filename :
5271659
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3527699
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