Title :
Preparation of surface photovoltage VOC detector
Author :
Yuliarto, Brian ; Nugraha ; Zhou, Hao Shen
Author_Institution :
Eng. Phys. Dept., Inst. Teknol. Bandung (ITB), Bandung, Indonesia
Abstract :
We successfully prepared the surface photovoltage sensor system using several types of modified mesoporous silica as a sensitive materials. The sensitive materials were fabricated using self-ordered and structure-controlled modified mesoporous thin films, which is synthesized by a molecule surfactant method using spin coating. The surface photo voltage sensor was characterized for the dangerous gas including different kind of VOC gas. The gas sensor, which is based on a metal-insulator-semiconductor (MIS) structure, showed high sensitivity and fast response at room temperature.
Keywords :
MIS devices; gas sensors; mesoporous materials; organic-inorganic hybrid materials; photodetectors; silicon compounds; spin coating; surface photovoltage; surfactants; thin film sensors; thin films; gas sensor; metal-insulator-semiconductor structure; molecule surfactant; room temperature; self-ordered modified mesoporous thin films; sensitivity; spin coating; structure-controlled modified mesoporous thin films; surface photovoltage VOC detector; surface photovoltage sensor system; temperature 293 K to 298 K; volatile organic compounds; Coatings; Gas detectors; Mesoporous materials; Metal-insulator structures; Sensor phenomena and characterization; Sensor systems; Silicon compounds; Temperature sensors; Transistors; Voltage; mesoporous; metal-insulator-semiconductor; sensor; surface photo voltage;
Conference_Titel :
Instrumentation, Communications, Information Technology, and Biomedical Engineering (ICICI-BME), 2009 International Conference on
Conference_Location :
Bandung
Print_ISBN :
978-1-4244-4999-6
Electronic_ISBN :
978-1-4244-5000-8
DOI :
10.1109/ICICI-BME.2009.5417234
