Title :
Field emitter array with a built-in multi-electrode lens
Author :
Nagao, M. ; Yoshida, T. ; Kanemaru, S. ; Neo, Y. ; Mimura, H.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
This paper reports the successful fabrication of a field emitter array with a built-in multi-electrode lens, such as a quad-gate and a penta-gate FEA. The fabrication is based on an etch-back technique.
Keywords :
electrodes; etching; field emitter arrays; lenses; built-in multielectrode lens; etch-back technique; field emitter array fabrication; pentagate FEA; quadgate FEA; Anodes; Electrodes; Etching; Fabrication; Field emitter arrays; Focusing; Insulation; Lenses; Resists; Voltage;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location :
Shizuoka
Print_ISBN :
978-1-4244-3587-6
Electronic_ISBN :
978-1-4244-3588-3
DOI :
10.1109/IVNC.2009.5271678
