Title :
Scanning hall probe microscopy (SHPM) using quartz crystal AFM feedback
Author :
Dede, M. ; Urkmen, K. ; Oral, Ahmet
Author_Institution :
Dept. of Phys., Bilkent Univ., Ankara, Turkey
Abstract :
In the scanning Hall probe microscopy (SHPM) technique, scanning tunneling microscope (STM) or atomic force microscope (AFM) feedback is usually used for bringing the Hall sensor into close proximity of a sample. Here, we used quartz crystal AFM feedback in microfabrication of Hall sensors and in the operation of SHPM. This method eliminates the necessity of conducting samples in SHPM.
Keywords :
Hall effect devices; atomic force microscopy; force sensors; nanotechnology; piezoelectric materials; quartz; scanning tunnelling microscopy; Hall sensor; Scanning Hall Probe Microscopy; Scanning Tunneling Microscope; SiO2; conducting samples; microfabrication; quartz crystal AFM feedback; Atomic force microscopy; Feedback; Force sensors; Gold; Gratings; Hall effect devices; Magnetic fields; Magnetic sensors; Surface topography; Tunneling;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1463528