Title :
Detecting defects of vacuum nanoelectron devices and IC based on penetrate insulating layer non-destructive endoscopy method in SEM
Author :
Hu, Wenguo ; Chen, Mingguang ; Fei, Xinliang ; Xiao, Lin ; Liang, Zhuguang ; Rau, E.I. ; Zhou, Kailin ; Wang, Jian ; Lan, Dechun ; Li, Ping
Author_Institution :
Sch. of Phys. Sci. & Technol., Yunnan Univ., Kunming, China
Abstract :
This paper is introduced untouchedly and nondestructively new testing method and instrument, this new method called ldquoelectron beam nondestructively microscopically penetrate insulating layer endoscopy VNED, IC and semiconductor detecting method and instrumentrdquo.
Keywords :
endoscopes; integrated circuits; nanoelectronics; nondestructive testing; scanning electron microscopy; sensors; vacuum apparatus; IC; SEM; VNED; defects; electron beam; nondestructive endoscopy method; penetrate insulating layer; semiconductor detecting method; vacuum nanoelectron devices; Electron beams; Endoscopes; Instruments; Insulation; Integrated circuit testing; Microstructure; Nanoscale devices; Nondestructive testing; Scanning electron microscopy; Semiconductor device testing;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location :
Shizuoka
Print_ISBN :
978-1-4244-3587-6
Electronic_ISBN :
978-1-4244-3588-3
DOI :
10.1109/IVNC.2009.5271686
