Title :
MEMS microswitch arrays for reconfigurable distributed microwave components
Author :
Bozler, C. ; Drangmeister, R. ; Duffy, S. ; Gouker, M. ; Knecht, J. ; Kushner, L. ; Parr, R. ; Rabe, S. ; Travis, L.
Author_Institution :
Lincoln Lab., MIT, Lexington, MA, USA
Abstract :
A novel MEMS switch design for use in microwave circuits is presented. The microswitch is capable of being configured in a multi-element X-Y array for use in tunable distributed circuits. Circuit design concepts using microswitch arrays and measurements of single microswitch performance are given.
Keywords :
micromechanical devices; microwave switches; MEMS microswitch array; reconfigurable distributed microwave component; tunable microwave distributed circuit; Bandwidth; Contacts; Frequency; Micromechanical devices; Microswitches; Microwave antenna arrays; Microwave circuits; Microwave devices; Silicon compounds; Switches;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.860909
