DocumentCode
353000
Title
A low voltage actuated micromachined microwave switch using torsion springs and leverage
Author
Dooyoung Hah ; Euisik Yoon ; Songcheol Hong
Author_Institution
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
Volume
1
fYear
2000
fDate
11-16 June 2000
Firstpage
157
Abstract
A new push-pull configuration using torsion springs and leverage for low-voltage actuated microwave switch is proposed. It is fabricated by surface micromachining and has demonstrated switch operation up to 4 GHz. The actuation voltage is 6 V and an isolation has been achieved of more than 28 dB by the push-pull configuration.
Keywords
low-power electronics; microactuators; micromachining; microstrip lines; microwave switches; 4 GHz; 6 V; actuated micromachined microwave switch; actuation voltage; isolation; leverage; push-pull configuration; surface micromachining; switch operation; torsion springs; Communication switching; Contacts; Electrodes; Electrostatics; Insertion loss; Low voltage; Microwave antenna arrays; Phased arrays; Springs; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location
Boston, MA, USA
ISSN
0149-645X
Print_ISBN
0-7803-5687-X
Type
conf
DOI
10.1109/MWSYM.2000.860913
Filename
860913
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