Process variation study of Ground Plane SOI MOSFET

Author

Saremi, Mehrin ; Ebrahimi, B. ; Kusha, Ali Afzali ; Saremi, Mehrin

Author_Institution

Nanoelectron. Center of Excellence, Univ. of Tehran, Tehran, Iran

fYear

2010

fDate

3-4 Aug. 2010

Firstpage

66

Lastpage

69

Abstract

In this paper, the variations of the main characteristics in three SOI device structures due to channel length and thin-film thickness variations are investigated. The structures are studied in a 32 nm technology and include SOI-GPS (Ground-Plane in Substrate), SOI-GPB (Ground-Plane in BOX), and SOI-WGP (Without Ground Plane). For this study, we assume normal distributions for the channel length and thin-film thickness of the transistors and then obtain the distributions for the threshold voltage, leakage, DIBL coefficient, and subthreshold swing. The results show that the GPS structure is more resistant against the variations when compared to the other two structures.

Keywords

MOSFET; normal distribution; semiconductor thin films; silicon-on-insulator; transistor circuits; DIBL coefficient; GPS structure; SOI device structure; SOI-GPB; SOI-GPS; SOI-WGP; channel length; drain-induced barrier lowering; ground plane SOI MOSFET; ground-plane in box; ground-plane in substrate; normal distribution; process variation; short-channel effect; silicon-on-insulator; size 32 nm; subthreshold swing; thin-film thickness variation; threshold voltage; transistor; without ground plane; Global Positioning System; Isolation technology; Laboratories; MOSFET circuits; Nanoelectronics; Semiconductor thin films; Silicon on insulator technology; Substrates; Thin film transistors; Threshold voltage; Drain-Induced Barrier Lowering (DIBL); Ground Plane (GP); Process variations; Short-Channel Effects (SCEs); Silicon-On-Insulator (SOI) MOSFET;

fLanguage

English

Publisher

ieee

Conference_Titel

Quality Electronic Design (ASQED), 2010 2nd Asia Symposium on

Conference_Location

Penang

Print_ISBN

978-1-4244-7809-5

Type

conf

DOI

10.1109/ASQED.2010.5548155

Filename

5548155