Title :
Successively dry-wet etched InP microlens for bell shaped LED
Author :
Jaeho Kim ; Kyoung Min Kim ; Jeon, Soo-Kun ; Kim, Moonjung ; Park, Eun-Hyun ; Kwon, Young-Se
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Abstract :
A method of fabricating monolithic InP microlenses, using successive dry-wet etching, is proposed. Dry etching is performed with reactive ion beam etching using Ar/Cl2/H2 gases. Wet etching with HBr/H3PO4/(0.5M) K2Cr2O7 is used for successive wet etching. In the other fabrication methods of microlenses, microlens structures are limited by the characteristics of photoresist, polymer or etchants. More suitable lens structure can be achieved by our proposed method. We have fabricated InGaAsP/InP surface emitting BS-LEDs with the monolithic InP microlenses by this method. The Bell Shaped LED with this microlens shows improved coupling efficiency to fiber.
Keywords :
III-V semiconductors; etching; gallium arsenide; indium compounds; light emitting diodes; microlenses; HBr-H3PO4-K2Cr2O7; HBr/H3PO4/K2Cr2O7; InGaAsP-InP; InGaAsP/InP surface emitting BS-LEDs; bell shaped LED; fabrication methods; reactive ion beam etching; successively dry-wet etched InP microlens; Argon; Chromium; Dry etching; Gases; Indium phosphide; Ion beams; Lenses; Light emitting diodes; Microoptics; Wet etching;
Conference_Titel :
Indium Phosphide and Related Materials, 2003. International Conference on
Print_ISBN :
0-7803-7704-4
DOI :
10.1109/ICIPRM.2003.1205342
