DocumentCode
3531747
Title
A Modular Structure For A Highly Detailed Model Of Semiconductor Manufacturing
Author
Hood, S.J. ; Amamoto, A.F.B.
Author_Institution
T.J. Watson Research Center
fYear
1989
fDate
4-6 Dec 1989
Firstpage
811
Lastpage
817
Keywords
Circuits; Discrete event simulation; Etching; Flexible manufacturing systems; Job shop scheduling; Resists; Semiconductor device manufacture; Switches; User interfaces; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference Proceedings, 1989. Winter
Print_ISBN
0-911801-58-8
Type
conf
DOI
10.1109/WSC.1989.718758
Filename
718758
Link To Document