DocumentCode
3531970
Title
Implementing The Results Of A Manufacturing Simulation In A Semiconductor Line
Author
Miller, David J.
Author_Institution
IBM General Technology Division
fYear
1989
fDate
4-6 Dec 1989
Firstpage
922
Lastpage
929
Keywords
Analytical models; Contamination; Costs; Lead compounds; Manufacturing processes; Process control; Semiconductor device manufacture; Semiconductor device modeling; Throughput; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference Proceedings, 1989. Winter
Print_ISBN
0-911801-58-8
Type
conf
DOI
10.1109/WSC.1989.718774
Filename
718774
Link To Document