DocumentCode
3533069
Title
Application for electric resistance element of granular films
Author
Yamadera, H.
Author_Institution
Toyota Central R&D Labs. Inc., Aichi, Japan
fYear
2005
fDate
4-8 April 2005
Firstpage
803
Lastpage
804
Abstract
Thin film electric resistance elements were presented, utilizing granular films of CoAlO. Electrical properties of the films show dependence with metal content and granular nanostructure. The values of α and β in the optimum metal content were as low as those of conventional metal film resistances. Sheet resistance values were observed to be much higher than those of conventional metal film resistances. Therefore, granular films are useful for application to thin film resistance for purpose of minimizing the resistance element.
Keywords
aluminium compounds; cobalt compounds; electric resistance; electrical resistivity; granular materials; nanostructured materials; thin film resistors; thin films; CoAlO; electrical properties; granular films; granular nanostructure; metal content; sheet resistance; thin film electric resistance element; Annealing; Electric resistance; Electric variables measurement; Electrical resistance measurement; Microstructure; Semiconductor films; Temperature measurement; Thin film circuits; Thin film sensors; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN
0-7803-9009-1
Type
conf
DOI
10.1109/INTMAG.2005.1463830
Filename
1463830
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