DocumentCode
35333
Title
Quality without compromise
Volume
27
Issue
4
fYear
2014
fDate
Nov. 2014
Firstpage
584
Lastpage
584
Abstract
Advertisement: Our publications, all peer-reviewed, are consistently the most highly cited in the field. Libraries and IEEE, quality our customers can trust. Journal Citation Report, Institute for Scientific Information, 1991-2001. www.ieee.org.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2014.2366685
Filename
6951499
Link To Document