Title :
Electrostatically tunable MEMS THz metamaterials based on DC/RF decoupled split-ring resonator arrays
Author :
Han, Zhengli ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
Res. Center for Adv. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan
Abstract :
High-frequency electromagnetic-field simulation HFSS has been performed on sub-millimeter scale split-ring resonator (SRR) metamaterials to propose electrostatically tunable THz frequency filters with integrated RF-MEMS variable capacitors and switches.
Keywords :
capacitors; metamaterials; micro-optomechanical devices; micromechanical resonators; microwave materials; optical arrays; optical materials; optical resonators; optical tuning; DC/RF decoupled split-ring resonator arrays; RF-MEMS variable capacitors; SRR; THz frequency filters; THz metamaterials; electrostatically tunable MEMS; high-frequency electromagnetic-field simulation; submillimeter scale split-ring resonator; switches; Capacitors; Electrodes; Electrostatics; Gold; Metamaterials; Micromechanical devices; Resonator filters; HFSS simulation; THz; split ring resonator;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318785
