Title :
The Casimir effect on silicon micromechanical systems: Forces due to virtual photons
Author :
Chan, H.B. ; Bao, Y. ; Zou, J.
Author_Institution :
Dept. of Phys., Hong Kong Univ. of Sci. & Technol., Hong Kong, China
Abstract :
The Casimir force arising from quantum fluctuations could become the dominant interaction in silicon micromechanical devices under the appropriate conditions. The measured force is distinct from the pairwise summation of van der Waals forces.
Keywords :
Casimir effect; elemental semiconductors; micro-optomechanical devices; silicon; van der Waals forces; Casimir effect; Si; silicon micromechanical systems; van der Waals forces; virtual photons; Casimir effect; Corrugated surfaces; Force; Force measurement; Gold; Silicon; Surface treatment; Casimir forces; force sensors; quantum fluctuations; surface interactions;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318786
