Title :
Polyacrylate tunable microlens with on-chip thermopneumatic actuation
Author :
Zhang, Wei ; Zappe, Hans ; Seifert, Andreas
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
We present a polyacrylate-based thermopneumati-cally tunable liquid microlens with on-chip actuation for focal length tuning. The use of a polyacrylate membrane allows use of silicone oil as the optical liquid without any swelling or degradation.
Keywords :
microactuators; microlenses; oils; pneumatic actuators; silicones; focal length tuning; on-chip actuation; on-chip thermopneumatic actuation; optical liquid; polyacrylate membrane; polyacrylate tunable microlens; silicone oil; thermopneumatically tunable liquid microlens; Lenses; Liquids; Microoptics; Optical device fabrication; Optical pumping; Optical sensors; Silicon; polyacrylate membrane; silicone oil; thermopneumatic; tunable microlens;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318800
