Title :
A stiffness-defined silicon plane bending method to realize perfectly-curved surface formation for tunable parabolic mirrors
Author :
Binh, Tran Nam ; Morishita, Satoshi ; Kubota, Masanori ; Mita, Yoshio
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.
Keywords :
bending; micro-optomechanical devices; microactuators; mirrors; optical tuning; silicon; sputter etching; DRIE; deep reactive ion etching; microactuator; perfectly curved surface formation; stiffness defined silicon plane bending method; tunable parabolic mirrors; vertical silicon plate; Approximation methods; Microactuators; Mirrors; Optical surface waves; Shape; Silicon; Surface waves; Curved Surface; Deep RIE; Parabola Mirror; in-Plane Optics;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318802
