Title :
Multimode interference (MMI) waveguides-based photonic modulators integrated on SOI substrates
Author :
Chuang, Ricky W. ; Hsu, Mao-Teng
Abstract :
Multimode interference (MMI) waveguides-based photonic modulators integrated on silicon-on-insulator (SOI) substrates are designed, fabricated and evaluated. With 100% modulation depth achieved, the lowest rise and fall times were respectively measured to be 52 and 48 ns. The highest 3 dB bandwidth in the excess of 6.5 MHz was determined from the corresponding devices.
Keywords :
elemental semiconductors; optical modulation; optical waveguides; silicon; silicon-on-insulator; SOI; Si; frequency 6.5 MHz; multimode interference waveguides-based photonic modulators; silicon-on-insulator substrates; time 48 ns; time 52 ns; Frequency measurement; Frequency modulation; Optical device fabrication; Optical interferometry; Optical modulation; Optical waveguides;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318806
