Title :
Mass replication of multifunctional surface by nanoimprint of high aspect ratio tapered nanostructures
Author :
Kim, Jeong-Gil ; Choi, Hyungryul J. ; Gao, Hanhong ; Cornago, Ignacio ; Chang, Chih-Hao ; Barbastathis, George
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
Tapered nanostructures with high aspect ratio were fabricated using high-throughput nanoimprint process. The replicated nanostructures have axially increasing effective refractive index, which enhances the optical transmission over a wide range of wavelengths and incident angles.
Keywords :
nanofabrication; nanolithography; nanostructured materials; refractive index; replica techniques; soft lithography; high aspect ratio; high-throughput nanoimprint process; incident angles; mass replication; multifunctional surface; optical transmission; refractive index; replicated nanostructures; tapered nanostructures; Lithography; Nanostructures; Optical device fabrication; Optical reflection; Optical refraction; Optical surface waves; Optical variables control;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318807
