Title :
A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators
Author :
Li Li ; Bauer, Ralf ; Brown, G. ; Uttamchandani, Deepak
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. of Strathclyde, Glasgow, UK
Abstract :
A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.
Keywords :
electrostatic actuators; micro-optomechanical devices; micromirrors; optical design techniques; optical scanners; 2D MEMS scanning micromirror; electrostatic actuator; electrothermal actuator; hybrid two-axis scanning micromirror; rectangular raster scan pattern; Electrostatic actuators; Electrostatics; Laser beams; Micromechanical devices; Micromirrors; Resonant frequency; MEMS; SOIMUMPs; microactuators; optical scanner;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318808
