DocumentCode
3533818
Title
A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators
Author
Li Li ; Bauer, Ralf ; Brown, G. ; Uttamchandani, Deepak
Author_Institution
Dept. of Electron. & Electr. Eng., Univ. of Strathclyde, Glasgow, UK
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
73
Lastpage
74
Abstract
A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.
Keywords
electrostatic actuators; micro-optomechanical devices; micromirrors; optical design techniques; optical scanners; 2D MEMS scanning micromirror; electrostatic actuator; electrothermal actuator; hybrid two-axis scanning micromirror; rectangular raster scan pattern; Electrostatic actuators; Electrostatics; Laser beams; Micromechanical devices; Micromirrors; Resonant frequency; MEMS; SOIMUMPs; microactuators; optical scanner;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318808
Filename
6318808
Link To Document