Title :
Subwavelength silicon honeycomb structure for tailored index in terahertz broadband region
Author :
Park, Sang-Gil ; Jin, Kyong-Hwan ; Yi, Minwoo ; Ye, Jong Chul ; Ahn, Jaewook ; Jeong, Ki-Hun
Author_Institution :
Dept. of Bio & Brain Eng., KAIST, Daejeon, South Korea
Abstract :
This work presents tailored index in terahertz broadband frequency by a subwavelength silicon honeycomb structures. The structure is fabricated by deep reactive ion etching process and their indices are tailored depending on size of structures.
Keywords :
elemental semiconductors; integrated optics; refractive index; silicon; sputter etching; Si; deep reactive ion etching process; subwavelength honeycomb structure; tailored index; terahertz broadband region; Broadband communication; Honeycomb structures; Indexes; Silicon; Spectroscopy; Time domain analysis; Terahertz wave; effective medium; tailored index;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318809
