Title :
Assembly of a MEMS-based Wolter type-I x-ray optic
Author :
Kakiuchi, T. ; Ezoe, Y. ; Moriyama, T. ; Mitsuishi, I. ; Ogawa, T. ; Mitsuda, K. ; Morishita, K. ; Nakajima, K.
Author_Institution :
Dept. of Phys., Tokyo Metropolitan Univ., Hachioji, Japan
Abstract :
Implementation of a MEMS-based Wolter type-I optic that is suitable for future planetary exploration missions is described. A devised alignment system permits independent adjustment of position and angular settings of x-ray mirrors.
Keywords :
X-ray astronomy; X-ray optics; micromechanical devices; mirrors; MEMS based Wolter type-I x-ray optic; alignment system; angular settings; planetary exploration missions; position settings; x-ray mirrors; Accuracy; Adaptive optics; Optical beams; Optical device fabrication; Optical diffraction; Optical imaging; X-ray imaging; Dry etching; Space missions; X-ray mirrors;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318814
