DocumentCode
3533937
Title
MEMS-based novel X-ray optics for future astronomical missions
Author
Mitsuishi, I. ; Ezoe, Y. ; Moriyama, T. ; Ogawa, T. ; Kakiuchi, T. ; Ohashi, T. ; Mita, M. ; Maeda, Y. ; Mitsuda, K. ; Horade, M. ; Sugiyama, S. ; Riveros, R. ; Yamaguchi, H. ; Kanamori, Y. ; Morishita, K. ; Nakajima, K. ; Maeda, R.
Author_Institution
Tokyo Metropolitan Univ., Tokyo, Japan
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
87
Lastpage
88
Abstract
We have been developing our original MEMS-based X-ray optics for future astronomical missions. To date, we verified the focusing of optical light and X-ray for the first time. The concept and recent advances are reviewed.
Keywords
LIGA; X-ray optics; micromechanical devices; optical focusing; sputter etching; MEMS; X-ray optics; future astronomical missions; optical light focusing; Educational institutions; Focusing; Micromechanical devices; Mirrors; Telescopes; X-ray imaging; DRIE; X-ray optics; annealing;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318815
Filename
6318815
Link To Document